Finite element simulation of pulsed laser ablation of titanium carbide

被引：67
|
作者：
Oliveira, V. [1 ]
Vilar, R. [1 ]
机构：
[1] Univ Tecn Lisboa, Dept Mat Engn, Inst Super Tecn, P-1049001 Lisbon, Portugal
来源：
APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 19期
关键词：
laser ablation; finite element simulation; titanium carbide;
D O I：
10.1016/j.apsusc.2007.02.101
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In the present paper, a 2D finite element model based on the heat-conduction equation and on the Hertz-Knudsen equation for vaporization was developed and used to simulate the ablation of TiC by Nd:YAG and KrF pulsed laser radiation. The calculations were performed for fluences of 8 2 and 10 J/cm(2) which according to experimental results obtained previously, correspond to large increases of the ablation rate. The calculated maximum surface temperature of the target for both lasers is higher than the estimated value of TiC critical temperature, corroborating the hypothesis that the increase of the ablation rate is explained by the explosive boiling mechanism. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：7810 / 7814
页数：5
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