Finite element simulation of pulsed laser ablation of titanium carbide

被引：67
|
作者：
Oliveira, V. [1 ]
Vilar, R. [1 ]
机构：
[1] Univ Tecn Lisboa, Dept Mat Engn, Inst Super Tecn, P-1049001 Lisbon, Portugal
来源：
APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 19期
关键词：
laser ablation; finite element simulation; titanium carbide;
D O I：
10.1016/j.apsusc.2007.02.101
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In the present paper, a 2D finite element model based on the heat-conduction equation and on the Hertz-Knudsen equation for vaporization was developed and used to simulate the ablation of TiC by Nd:YAG and KrF pulsed laser radiation. The calculations were performed for fluences of 8 2 and 10 J/cm(2) which according to experimental results obtained previously, correspond to large increases of the ablation rate. The calculated maximum surface temperature of the target for both lasers is higher than the estimated value of TiC critical temperature, corroborating the hypothesis that the increase of the ablation rate is explained by the explosive boiling mechanism. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：7810 / 7814
页数：5
相关论文
共 50 条
  • [1] Femtosecond pulsed laser ablation and deposition of titanium carbide
    Teghil, R.
    D'Alessio, L.
    De Bonis, A.
    Galasso, A.
    Villani, P.
    Santagata, A.
    THIN SOLID FILMS, 2006, 515 (04) : 1411 - 1418
  • [2] Nanosecond pulsed laser ablation of silicon-finite element simulation and experimental validation
    Zhang, Junjie
    Zhao, Liang
    Rosenkranz, Andreas
    Song, Chengwei
    Yan, Yongda
    Sun, Tao
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019, 29 (07)
  • [3] A finite element model to predict the ablation depth in pulsed laser ablation
    Vasantgadkar, Nikhil A.
    Bhandarkar, Upendra V.
    Joshi, Suhas S.
    THIN SOLID FILMS, 2010, 519 (04) : 1421 - 1430
  • [4] Hardness of titanium carbide films deposited on silicon by pulsed laser ablation
    De Maria, G
    Ferro, D
    D'Alessio, L
    Teghil, R
    Barinov, SM
    JOURNAL OF MATERIALS SCIENCE, 2001, 36 (04) : 929 - 935
  • [5] Study of the gaseous phase from pulsed laser ablation of titanium carbide
    Santagata, A
    Marotta, V
    DAlessio, L
    Teghil, R
    Ferro, D
    DeMaria, G
    APPLIED SURFACE SCIENCE, 1997, 109 : 376 - 379
  • [6] Hardness of titanium carbide films deposited on silicon by pulsed laser ablation
    G. De Maria
    D. Ferro
    L. D'Alessio
    R. Teghil
    S. M. Barinov
    Journal of Materials Science, 2001, 36 : 929 - 935
  • [7] Synthesis and characterisation of titanium carbide thin films produced by pulsed laser ablation
    DeMaria, G
    DAlessio, L
    Teghil, R
    Brunetti, B
    Ferro, D
    PROCEEDINGS OF THE NINTH INTERNATIONAL CONFERENCE ON HIGH TEMPERATURE MATERIALS CHEMISTRY, 1997, 97 (39): : 556 - 563
  • [8] Finite element simulation of infrared laser ablation for mass spectrometry
    Huang, Fan
    Murray, Kermit K.
    RAPID COMMUNICATIONS IN MASS SPECTROMETRY, 2012, 26 (18) : 2145 - 2150
  • [9] Pulsed laser ablation and deposition of niobium carbide
    Sansone, M.
    De Bonis, A.
    Santagata, A.
    Rau, J. V.
    Galasso, A.
    Teghil, R.
    APPLIED SURFACE SCIENCE, 2016, 374 : 112 - 116
  • [10] Numerical simulation of the nano-second pulsed laser ablation process based on the finite element thermal analysis
    Lee, Jaeyeol
    Yoo, Jeonghoon
    Lee, Kyunghoon
    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2014, 28 (05) : 1797 - 1802
12345