A latching MEMS relay for DC and RF applications

被引：19

作者：

Agrawal, V ^{[1
]}

机构：

[1] Memscap Inc, Res Triangle Pk, NC USA

来源：

ELECTRICAL CONTACTS-2004: PROCEEDINGS OF THE 50TH IEEE HOLM CONFERENCE ON ELECTRICAL CONTACTS/THE 22ND INTERNATIONAL CONFERENCE ON ELECTRICAL CONTACTS | 2004年

关键词：

MEMS; relay; latching; DC; RF; thermal;

D O I：

10.1109/HOLM.2004.1353121

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A latching MEMS relay, based on thermal actuator, for both DC and RF applications will be described. In contrast to electrostatic MEMS relays that require a voltage to hold a closed state, this relay is a true mechanical latching design where no power is required to hold a state. For DC applications, the relay can typically switch 250 mA of current in cold switching configuration, and up to 10 mA at 10 V in hot switching applications. For RF relay, based on the similar design, typical performance parameters are (at 6 GHz): isolation similar to -40 dB, and > insertion loss < -1.0 dB and return loss < -15 dB.

引用

页码：222 / 225

页数：4