Lateral current injection photonic crystal membrane light emitting diodes

被引:12
作者
Long, Christopher M. [1 ]
Giannopoulos, Antonios V. [1 ]
Choquette, Kent D. [1 ]
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2010年 / 28卷 / 02期
基金
美国国家科学基金会;
关键词
gallium arsenide; gallium compounds; indium compounds; light emitting diodes; optical fabrication; photonic crystals; p-n junctions; LASERS; INP;
D O I
10.1116/1.3360891
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel method for fabricating photonic crystal membrane light emitting diodes is presented. The device employs a transverse diode structure and injects carriers laterally through a photonic crystal patterned at the p-n junction within a membrane. Details of the fabrication process as well as electrical and optical characteristics of the devices are presented.
引用
收藏
页码:359 / 364
页数:6
相关论文
共 32 条
  • [1] Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities
    Asano, T
    Song, BS
    Noda, S
    [J]. OPTICS EXPRESS, 2006, 14 (05): : 1996 - 2002
  • [2] A survey of ohmic contacts to III-V compound semiconductors
    Baca, AG
    Ren, F
    Zolper, JC
    Briggs, RD
    Pearton, SJ
    [J]. THIN SOLID FILMS, 1997, 308 : 599 - 606
  • [3] Electrically injected quantum-dot photonic crystal microcavity light-emitting arrays with air-bridge contacts
    Chakravarty, S.
    Bhattacharya, P.
    Mi, Z.
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2006, 18 (21-24) : 2665 - 2667
  • [4] Photonic integrated circuits fabricated using ion implantation
    Charbonneau, S
    Koteles, ES
    Poole, PJ
    He, JJ
    Aers, GC
    Haysom, J
    Buchanan, M
    Feng, Y
    Delage, A
    Yang, F
    Davies, M
    Goldberg, RD
    Piva, PG
    Mitchell, IV
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1998, 4 (04) : 772 - 793
  • [5] QUANTUM-WELL INTERMIXING FOR OPTOELECTRONIC INTEGRATION USING HIGH-ENERGY ION-IMPLANTATION
    CHARBONNEAU, S
    POOLE, PJ
    PIVA, PG
    AERS, GC
    KOTELES, ES
    FALLAHI, M
    HE, JJ
    MCCAFFREY, JP
    BUCHANAN, M
    DION, M
    GOLDBERG, RD
    MITCHELL, IV
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 78 (06) : 3697 - 3705
  • [6] IMPLANTATION DISORDERING OF ALXGA1-XAS SUPERLATTICES
    GAVRILOVIC, P
    DEPPE, DG
    MEEHAN, K
    HOLONYAK, N
    COLEMAN, JJ
    BURNHAM, RD
    [J]. APPLIED PHYSICS LETTERS, 1985, 47 (02) : 130 - 132
  • [7] Photonic crystal heterostructure cavity lasers using kagome lattices
    Giannopoulos, A. V.
    Long, C. M.
    Choquette, K. D.
    [J]. ELECTRONICS LETTERS, 2008, 44 (13) : 803 - U37
  • [8] BANDGAP SHIFTED INGAASP/INP QUANTUM-WELL WAVE-GUIDES USING MEV ION-IMPLANTATION
    HE, JJ
    FENG, Y
    KOTELES, ES
    POOLE, PJ
    DAVIS, M
    DION, M
    GOLDBERG, R
    MITCHELL, I
    CHARBONNEAU, S
    [J]. ELECTRONICS LETTERS, 1995, 31 (24) : 2094 - 2095
  • [9] Coherent two-dimensional lasing action in surface-emitting laser with triangular-lattice photonic crystal structure
    Imada, M
    Noda, S
    Chutinan, A
    Tokuda, T
    Murata, M
    Sasaki, G
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (03) : 316 - 318
  • [10] Guided modes in photonic crystal slabs
    Johnson, SG
    Fan, SH
    Villeneuve, PR
    Joannopoulos, JD
    Kolodziejski, LA
    [J]. PHYSICAL REVIEW B, 1999, 60 (08): : 5751 - 5758