The influence of Si concentrations on the oxidation resistance of Mo-Si-B-(N) coatings

被引：16

作者：

Kiryukhantsev-Korneev, Ph. V. ^{[1
]}

Andreev, S. O. ^{[1
]}

Shvyndina, N. V. ^{[1
]}

Levashov, E. A. ^{[1
]}

Timofeev, A. N. ^{[2
]}

Shtansky, D. V. ^{[1
]}

机构：

[1] Natl Univ Sci & Technol MISiS, Moscow 119049, Russia

[2] OAO Kompozit, Korolev 141070, Moscow Oblast, Russia

来源：

RUSSIAN JOURNAL OF NON-FERROUS METALS | 2014年 / 55卷 / 06期

关键词：

Mo-Si-B and Mo-Si-B-N coatings; oxidation resistance; magnetron sputtering; SHS targets; TEM; SEM-EDS; GDOES; CR-B-N; THERMAL-STABILITY; NANOCOMPOSITE COATINGS; NITROGEN PRESSURE; BIAS VOLTAGE; FILMS; BEHAVIOR;

D O I：

10.3103/S106782121406011X

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

The influence of the silicon concentration on the oxidation resistance of Mo-Si-B-N coatings prepared by magnetron sputtering is investigated. The Si content in them was controlled by the composite-target composition, as well as by various areas of silicon segments placed into the target-erosion zone. The composition and structure of coatings after deposition and annealing in air at temperatures of 500-1300A degrees C are investigated using transmission and scanning electron microscopy, energy-dispersive analysis, and glow-discharge optical emission spectroscopy. It is established that oxidation resistance increases as the Si concentration in coatings increases, which is caused by the formation of a silicon oxide-based dense layer; this layer prevents oxygen propagation into the coating depth upon heating. The maximal oxidation resistance at a level of 1300A degrees C is attained in Mo-Si-B-N coatings containing 40 at % Si.

引用

页码：645 / 651

页数：7

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