Quasi-Static Displacement Self-Sensing Measurement for a 2-DOF Piezoelectric Cantilevered Actuator

被引：28

作者：

Ivan, Ioan Alexandru ^{[1
,2
,3
]}

Aljanaideh, Omar ^{[1
,4
]}

Agnus, Joel ^{[5
]}

Lutz, Philippe ^{[1
]}

Rakotondrabe, Micky ^{[1
]}

机构：

[1] Univ Burgundy Franche Comte, FEMTO ST Inst, Automat & MicroMechatron Syst Dept, F-25030 Besancon, France

[2] LTDS Lab, F-69134 Ecully, France

[3] ENISE Univ, F-42100 St Etienne, France

[4] Univ Washington, Elect Engn Dept, Seattle, WA 98195 USA

[5] Ecole Natl Super Mecan & Microtech, FEMTO ST Inst, Automat & MicroMechatron Syst Dept, F-25000 Besancon, France

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS | 2017年 / 64卷 / 08期

关键词：

Actuator; measurement; piezoelectric self-sensing; two degrees of freedom (2-DOF); ADAPTIVE-CONTROL;

D O I：

10.1109/TIE.2017.2677304

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper proposes a self-sensing measurement technique to perform the precise estimation of the displacements along two axes in a two-degrees-of-freedom (2-DOF) piezoelectric actuator. For that, a new electrical circuit scheme that permits charge amplification is first proposed to match the different electrodes combination of the 2-DOF actuator. Then, a new bivariable observer that precisely estimates the displacements is calculated and implemented experimentally in a cascade with the electrical circuit to complete the self-sensing. The experimental tests and results verification with external sensors revealed that the measured displacements given by the developed self-sensing measurement technique derive better than a micron of precision which well fits to micromanipulation applications. Discussion about the features and the performances improvement perspectives of the suggested approach are presented at the end of the paper.

引用

页码：6330 / 6337

页数：8