Design of Single Cell Membrane Shape and Array Configuration for MEMS Based Micromachined Ultrasonic Sensor to Improve the Performance: A Three Dimensional Model Characterization

The output acoustic energy of a capacitive micromachined ultrasonic transducer (CMUT) can be enhanced by adjusting its membrane structure. In this paper three dissimilar membranes shapes of CMUT: circular, rectangular and hexagonal, were aimed and 3D finite element method simulated using adaptive meshing technique. The displacement as well as strain and stress outputs for a single membrane and an array of four membranes on a single substrate were obtained. The simulated results are supported by analytical modeling. A static bias of 40 V and a signal of amplitude 100 mV are employed. A pressure of 8603.98 N/m(2) resulting in a force of 16.894 mu N was applied at the membrane. Fixtures were provided on every possible face of the structure except the face 1 (membrane). The outcomes showed that the membrane displacement is highest for a circular geometry under same uniform pressure and area of vibration. Moreover as the distance between the elemental membranes increases the displacement decreases for circular and hexagonal membranes while the reverse behavior is observed for rectangular membranes.