Design of infrared wavelength-selective microbolometers using planar multimode detectors

被引：29

作者：

Han, SW ^{[1
]}

Kim, JW ^{[1
]}

Sohn, YS ^{[1
]}

Neikirk, DP ^{[1
]}

机构：

[1] Univ Texas, Microelect Res Ctr, Dept Elect & Comp Engn, Austin, TX 78712 USA

来源：

ELECTRONICS LETTERS | 2004年 / 40卷 / 22期

关键词：

D O I：

10.1049/el:20046547

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Multimode microbolometers for wavelength-selective infrared detection have been designed using a genetic algorithm and an electromagnetic model of the planar antenna. Wavelength selectivity can be varied by changing lithographically drawn parameters, with bandwidth narrower than Fabry-Perot microbolometers. The design of a three-colour system covering the 7-14 mum band is presented.

引用

页码：1410 / 1411

页数：2

共 10 条

[1] THEORETICAL AND EXPERIMENTAL ANALYSIS OF A WAVEGUIDE MOUNTING STRUCTURE [J].

EISENHAR.RL ;

KHAN, PJ .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1971, MT19 (08) :706-&

[2] Silicon bolometer and micro variable infrared filter for CO2 measurement [J].

Hara, H ;

Kishi, N ;

Iwaoka, H .

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2000, :139-140

[3] Infrared wavelength selective micromachined microbolometers [J].

Kim, JW ;

Neikirk, DP .

SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2, 2003, 5116 :514-522

[4]

Pozar DM., 1993, Microwave engineering

[5]

RAHMATSAMII Y, 1999, ELECT OPTIMIZATION G

[6] PLANAR MULTIMODE DETECTOR ARRAYS FOR INFRARED AND MILLIMETER-WAVE APPLICATIONS [J].

RUTLEDGE, DB ;

SCHWARZ, SE .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1981, 17 (03) :407-414

[7]

Schimert T. R., 2001, Proceedings of the SPIE - The International Society for Optical Engineering, V4232, P187, DOI 10.1117/12.417531

[8]

STEAD AJ, 1999, HIGH PERFORMANCE ELE, P119

[9]

YOO SJ, 2000, THESIS U TEXAS AUSTI

[10]

Zheng SB, 2002, COMMUN THEOR PHYS, V38, P9

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