Predictions and measurement of mass loading effects on quartz bulk acoustic wave resonators

被引：0

作者：

Mateescu, I. ^{[1
]}

Bran, C. ^{[1
]}

Ballandras, S. ^{[2
]}

Gachon, D. ^{[2
]}

机构：

[1] Natl Inst Mat Phys, Bucharest, Romania

[2] FEMTO ST, Dept LPMO, CNRS, UMR 6174, Besancon, France

来源：

PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EXPOSITION, VOLS 1 AND 2 | 2006年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The use of a variationnal perturbation method combined with finite element analysis is presented here to simulate the influence of mass-loading effects on the resonance frequency of bulk acoustic wave resonator. Computations are conducted on 2D and 3D and any shape of resonator can be considered. Predictions are compared to experimental data.

引用

页码：213 / +

页数：2

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