A tolerancing procedure for inherently compensated, rectangular aerostatic thrust bearings

被引：49
作者：
Kwan, YBP
Post, JB
机构：
[1] ASM Lithog BV, NL-5503 LA Veldhoven, Netherlands
[2] Philips Ctr Mfg Technol, NL-5600 MD Eindhoven, Netherlands
来源：
TRIBOLOGY INTERNATIONAL | 2000年 / 33卷 / 08期
关键词：
aerostatic thrust bearing; manufacturing tolerances;
D O I：
10.1016/S0301-679X(00)00109-2
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Manufacturing errors on aerostatic bearing surfaces and orifice geometry are known to impair performance. Theoretical analyses were carried out on a rectangular thrust bearing for the most common form of gap non-uniformities - tilt, concavity, convexity and waviness at various spatial wavelengths, as well as changes in orifice diameter and position from the bearing edge. The results illustrate the sensitivity of both static load and stiffness to various forms of manufacturing error. A tolerancing procedure is recommended to limit changes in static load and stiffness to 10%. (C) 2000 Elsevier Science Ltd. All rights reserved.
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页码：581 / 585
页数：5
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