Soft lithography replica molding of critically coupled polymer microring resonators

被引：54

作者：

Poon, JKS ^{[1
]}

Huang, YY

Paloczi, GT

Yariv, A

机构：

[1] CALTECH, Dept Elect Engn, Pasadena, CA 91125 USA

[2] CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2004年 / 16卷 / 11期

基金：

加拿大自然科学与工程研究理事会; 美国国家科学基金会;

关键词：

optical device fabrication; optical polymers; optical resonators;

D O I：

10.1109/LPT.2004.835610

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We use soft lithography replica molding to fabricate unclad polystyrene (PS) and clad SU-8 microring resonator filters. The PS resonator has an intrinsic quality factor of 1.0 x 10(4) at lambda = 1.55 mum, while that of the SU-8 resonator is 7100. The extinction ratios of the PS and SU-8 microring filters are -12 and -20 dB, respectively, with net insertion losses of 6.7 and 9.9 dB. The good quality factors and high extinction ratios of the microring resonator filters show the practicality of soft-lithography replica molding for the fabrication of integrated optical devices.

引用

页码：2496 / 2498

页数：3

共 16 条

[1] Compact microring notch filters [J].