Single-etch subwavelength engineered fiber-chip grating couplers for 1.3 μm datacom wavelength band

被引：36

作者：

Benedikovic, Daniel ^{[1
]}

Alonso-Ramos, Carlos ^{[1
]}

Cheben, Pavel ^{[2
]}

Schmid, Jens H. ^{[2
]}

Wang, Shurui ^{[2
]}

Halir, Robert ^{[3
]}

Ortega-Monux, Alejandro ^{[3
]}

Xu, Dan-Xia ^{[2
]}

Vivien, Laurent ^{[1
]}

Lapointe, Jean ^{[2
]}

Janz, Siegfried ^{[2
]}

Dado, Milan ^{[4
]}

机构：

[1] Univ Paris Saclay, Univ Paris 11, Inst Elect Fondamentale, CNRS,UMR8622, Bat 220, Orsay, France

[2] Natl Res Council Canada, Informat & Commun Technol, 1200 Montreal Rd, Ottawa, ON K1A 0R6, Canada

[3] Univ Malaga, ETSI Telecomunicac, Dept Ingn Comunicac, Malaga 29010, Spain

[4] Univ Zilina, Fac Elect Engn, Dept Telecommun & Multimedia, Univ 8215-1, Zilina 01026, Slovakia

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 12期

基金：

欧洲研究理事会;

关键词：

INSULATOR WAVE-GUIDES; INTERLEAVED TRENCHES; EFFICIENCY;

D O I：

10.1364/OE.24.012893

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report, for the first time, on the design and experimental demonstration of fiber-chip surface grating couplers based on subwavelength grating engineered nanostructure operating in the low fiber chromatic dispersion window (around 1.3 mu m wavelengths), which is of great interest for short-reach data communication applications. Our coupler designs meet the minimum feature size requirements of large-volume deep-ultraviolet stepper lithography processes. The fiber-chip couplers are implemented in a standard 220-nm-thick silicon-on-insulator (SOI) platform and are fabricated by using a single etch process. Several types of couplers are presented, specifically the uniform, the apodized, and the focusing designs. The measured peak coupling efficiency is -2.5 dB (56%) near the central wavelength of 1.3 mu m. In addition, by utilizing the technique of the backside substrate metallization underneath the grating couplers, the coupling efficiency of up to -0.5 dB (89%) is predicted by Finite Difference Time Domain (FDTD) calculations. (C) 2016 Optical Society of America

引用

页码：12893 / 12904

页数：12

共 39 条

[1] Fiber-chip grating coupler based on interleaved trenches with directionality exceeding 95% [J].