Transient pressure induced by laser ablation of toluene, a highly laser-absorbing liquid

被引：56

作者：

Kawaguchi, Y ^{[1
]}

Ding, X ^{[1
]}

Narazaki, A ^{[1
]}

Sato, T ^{[1
]}

Niino, H ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Photoreact Control Res Ctr, Tsukuba, Ibaraki 3058565, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 80卷 / 02期

关键词：

D O I：

10.1007/s00339-003-2347-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transient processes of laser ablation of a highly laser-absorbing liquid, toluene, were investigated by directly measuring (by using a fast-response pressure gauge) the transient pressure caused by toluene ablation under KrF laser irradiation. The results were compared with time-resolved images. The peak pressure P due to a shock wave decreased slowly with increasing distance d for d = 100-1000 mum : P proportional to d(-0.33). By extrapolating P to d = 8.9 mum, the optical penetration depth of toluene at lambda = 248 nm, the estimated initial pressure due to toluene ablation was 65 MPa at 1.0 J cm(-2) pulse(-1). The estimated initial pressure increased linearly with the fluence. These results help clarify the mechanism of laser-induced backside wet etching.

引用

页码：275 / 281

页数：7

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