Pneumatically Actuated Tunable Terahertz Metamaterial Absorber With Dual-Side Tuning Capability

Aiming to achieve dual-side postfabrication performance tuning capability, a new tunable terahertz metamaterial absorber design with built-in pneumatic actuation mechanism was proposed, in which a circular split ring resonator with double-slit was adopted. Using multiphysics simulation, including electromagnetic and mechanical, the desired dualside tuning on absorption peak has been successfully demonstrated by simply changing the direction as well as the amplitude of the applied pressure, agreeing well with theoretical expectation. In addition, detailed discussion about the design optimization strategy for the radius of the split ring resonator from the consideration on improving tuning range was also provided.