Preparation and thermoelectric characteristics of ITO/Pt thin film thermocouples on Ni-based superalloy substrate

被引：16
作者：
Zhao, Xiaohui [1 ]
Li, Haitao [1 ]
Chen, Yinzhi [1 ]
Jiang, Hongchuan [1 ]
机构：
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Film & Integrated Device, Chengdu, Sichuan, Peoples R China
来源：
VACUUM | 2017年 / 140卷
基金：
中国国家自然科学基金;
关键词：
ITO; Thin film thermocouple; Magnetron sputtering; Ni-based superalloy; GAS-TURBINE ENGINES; TEMPERATURE-MEASUREMENT; MICROSTRUCTURE; FABRICATION; STABILITY;
D O I：
10.1016/j.vacuum.2016.11.034
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin film thermocouples could provide precise temperature measurement of the hot components of gas turbine engines with fast response in harsh environments. ITO thin films were prepared by radio frequency magnetron sputtering in pure argon atmosphere and annealed in air at 1000 degrees C. The variation of the microstructure and electrical properties of indium tin oxide thin films with annealing was disclosed. ITO/Pt thin film thermocouple was fabricated on Ni-based superalloy substrate by sputtering with stencil mask. And the thermoelectric performance and stability of the thin film thermocouples were characterized with temperature up to 1100 degrees C. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码：116 / 120
页数：5
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