The impact of phase errors on phase-shifting masks, part 3

被引：0
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作者：
Mack, CA [1 ]
机构：
[1] KLA Tencor, FINLE Div, Austin, TX USA
来源：
MICROLITHOGRAPHY WORLD | 2004年 / 13卷 / 03期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：8 / +
页数：2
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