Metal-Based 'Piezoelectric Optical Microscanning Devices with Low Driving Voltage

Metal-based optical MEMS scanning devices employed an AIST-original MEMS driving method, Lamb-wave-resonance piezoelectric driving method. It achieved large optical scanning angles of 100 or greater at high scanning speeds (25 kHz or higher) and low driving voltages (20 V or less), those are required to be used in practical projection displays. Owing to the use of a metal-based structure, manufacturing cost will be reduced to one-tenth of the existing manufacturing cost. The device also passed a continuous durability test for more than thirty thousand hours, and the fluctuations in the scan time for twenty thousand scans were less than the order of nanoseconds.