PROPERTIES OF DLC COATINGS DEPOSITED BY DC AND DC WITH SUPERIMPOSED PULSED VACUUM ARC

被引：0

作者：

Zavaleyev, V. ^{[1
]}

Walkowicz, J. ^{[1
]}

Aksyonov, D. S. ^{[2
]}

Luchaninov, A. A. ^{[2
]}

Reshetnyak, E. N. ^{[2
]}

Strel'nitskij, V. E. ^{[2
]}

机构：

[1] Koszalin Univ Technol, Inst Technol & Educ, Koszalin, Poland

[2] NSC Kharkov Inst Phys & Technol, Kharkov, Ukraine

来源：

PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2014年 / 06期

关键词：

FILMS;

D O I：

暂无

中图分类号：

O57 [原子核物理学、高能物理学];

学科分类号：

070202 ;

摘要：

Comparative studies of the structure, mechanical and tribological properties of DLC coatings deposited in DC and DC with superimposed high current pulse modes of operation vacuum-arc plasma source with the graphite cathode are presented. Imposition the pulses of high current on DC vacuum-arc discharge allows both increase the deposition rate of DLC coating and reduce the residual compressive stress in the coatings what promotes substantial improvement the adhesion to the substrate. Effect of vacuum arc plasma filtration with Venetian blind filter on the deposition rate and tribological characteristics of the coatings analyzed.

引用

页码：237 / 240

页数：4

共 7 条

[1]

Aksyonov DS, 2007, PROBL ATOM SCI TECH, P106

[2] Use of low energy and high frequency PBII during thin film deposition to achieve relief of intrinsic stress and microstructural changes [J].