Nucleation and growth of highly oriented lead titanate thin films prepared by a sol-gel method

被引:37
作者
Lai, YC [1 ]
Lin, JC [1 ]
Lee, CP [1 ]
机构
[1] Natl Taiwan Univ Sci & Technol, Dept Chem Engn, Taipei 106, Taiwan
关键词
PbTiO3; nucleation; AFM; sol-gel; thin film;
D O I
10.1016/S0169-4332(97)00389-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Highly (100)-oriented PbTiO3 thin films were grown on Pt/Ti/Si(100) substrates by a sol-gel method. The nucleation and growth processes were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. The chemical bondings and chemical composition of the films were also determined by X-ray photoelectron spectroscopy (XPS). A crystallization mechanism for controlling the film characteristics is presented. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:51 / 57
页数:7
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