LEAKAGE CURRENT MECHANISMS;
CHEMICAL-VAPOR-DEPOSITION;
MOLECULAR-BEAM EPITAXY;
SCHOTTKY CONTACTS;
GAN;
DISLOCATIONS;
D O I:
10.7567/JJAP.57.070310
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
A new nonvolatile memory based on intersubband transitions and electron accumulation in GaN/AlN resonant tunneling diodes (RTDs) was investigated toward the realization of a high-speed nonvolatile random-access memory (RAM) operating on picosecond time scales. It was shown that the endurance of write/erase memory operations can be enhanced by reducing the structural inhomogeneity of GaN/AlN RTDs. Neither mechanical damage nor significant degradation of current-voltage characteristics was observed after repeated write/erase memory operations using GaN/AlN RTDs with small degrees of inhomogeneity. High-endurance nonvolatile RAMs for computing systems are expected to be realized by further improvement in the crystal quality of GaN/AlN RTDs. (C) 2018 The Japan Society of Applied Physics