Optimized operation of silicon nanowire field effect transistor sensors

被引:10
作者
Rim, Taiuk [1 ,2 ]
Meyyappan, M. [1 ,2 ,3 ]
Baek, Chang-Ki [1 ,2 ]
机构
[1] Pohang Univ Sci & Technol POSTECH, Dept Creat IT Engn, Pohang 790784, South Korea
[2] Pohang Univ Sci & Technol POSTECH, Future IT Innovat Lab, Pohang 790784, South Korea
[3] NASA, Ames Res Ctr, Moffett Field, CA 94035 USA
关键词
ion-sensitive field effect transistor; honeycomb structure; low frequency noise; sensor reliability; pH sensors; ELECTRODE; NOISE;
D O I
10.1088/0957-4484/25/50/505501
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Ion-sensitive field effect transistors have been advanced in recent years by utilizing silicon nanowires (Si-NWs), but establishing their optimized operation regime is an area of ongoing research. We propose a modified configuration of SiNWs in the form of a honeycomb structure to obtain high signal to noise ratio and high current stability. The low-frequency noise characteristics and the electrical stress are systematically considered for the optimization and compared against conventional SiNW devices. The operation voltage of the device severely affects the sensing stability; as the gate voltage is increased, the signal-to-noise ratio is enhanced, however, the stress effect becomes severe, and vice versa. The honeycomb nanowire structure shows enhanced noise characteristics in low voltage operation, proving to be an optimum solution for achieving highly stable sensor operation.
引用
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页数:7
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