High-sensitivity measurement of particles on SOI wafers

被引：0
|
作者：
Naruoka, H [1 ]
Yoshida, Y [1 ]
Iwamatsu, T [1 ]
Yamaguchi, Y [1 ]
Ipposhi, T [1 ]
Yamamoto, H [1 ]
机构：
[1] Mitsubishi Elect Corp, ULSI Lab, Itami, Hyogo 664, Japan
来源：
1997 IEEE INTERNATIONAL SOI CONFERENCE PROCEEDINGS | 1996年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：182 / 183
页数：2
相关论文
共 50 条
  • [1] High-sensitivity SOI MOS photodetector with self-amplification
    Yamamoto, H
    Taniguchi, K
    Hamaguchi, C
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2B): : 1382 - 1386
  • [2] High-sensitivity SOI MOS photodetector with self-amplification
    Yamamoto, Hideaki
    Taniguchi, Kenji
    Hamaguchi, Chihiro
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (2 B): : 1382 - 1386
  • [3] Measurement of the absolute sensitivity of a high-sensitivity microchannel plate
    Matoba, Shiro
    Takahashi, Ryota
    Io, Chiro
    Koizumi, Tetsuo
    Shiromaru, Haruo
    XXVII INTERNATIONAL CONFERENCE ON PHOTONIC, ELECTRONIC AND ATOMIC COLLISIONS (ICPEAC 2011), PTS 1-15, 2012, 388
  • [4] HIGH-SENSITIVITY MEASUREMENT OF STRAIN BY MOIRE INTERFEROMETRY
    MORIMOTO, Y
    HAYASHI, T
    WADA, K
    JSME INTERNATIONAL JOURNAL SERIES I-SOLID MECHANICS STRENGTH OF MATERIALS, 1989, 32 (01): : 122 - 127
  • [5] High-Sensitivity Measurement of Density by Magnetic Levitation
    Nemiroski, Alex
    Kumar, A. A.
    Soh, Siowling
    Harburg, Daniel V.
    Yu, Hai-Dong
    Whitesides, George M.
    ANALYTICAL CHEMISTRY, 2016, 88 (05) : 2666 - 2674
  • [6] HIGH-SENSITIVITY MEASUREMENT OF METASTABLE ION ABUNDANCES
    MCLAFFERTY, FW
    OKAMOTO, J
    TSUYAMA, H
    NAKAJIMA, Y
    NODA, T
    MAJOR, HW
    ORGANIC MASS SPECTROMETRY, 1969, 2 (07): : 751 - +
  • [7] High-sensitivity measurement of surface optical nonlinearities
    Shi, Min
    Yang, Junyi
    Li, Zhongguo
    Nie, Zhongquan
    Song, Yinglin
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2013, 25 (03): : 583 - 586
  • [8] Design issues in SOI-based high-sensitivity piezoresistive cantilever devices
    Kassegne, S
    Madou, M
    Whitten, R
    Zoval, J
    Mather, E
    Sarkar, K
    Hodko, D
    Maity, S
    SMART STRUCTURES AND MATERIALS 2002: MODELING, SIGNAL PROCESSING, AND CONTROL, 2002, 4693 : 588 - 597
  • [9] Interference in the measurement of troponin T by a high-sensitivity method
    Aliste Fernandez, M.
    Sole Enrech, G.
    Cano Corres, R.
    Berlanga Escalera, E.
    CLINICA CHIMICA ACTA, 2019, 493 : S180 - S180
  • [10] High-sensitivity measurement and control of thermal noise in a cavity
    Heidmann, A
    Cohadon, PF
    Hadjar, Y
    Pinard, M
    GRAVITATIONAL WAVES, 2000, 523 : 435 - 436
12345