Ultra-miniature fiber-optic pressure sensor using white light interferometry

被引：124

作者：

Totsu, K

Haga, Y

Esashi, M

机构：

[1] Tohoku Univ, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

[2] Tohoku Univ, Biomed Engn Res Org, TUBERO, Aoba Ku, Sendai, Miyagi 9808579, Japan

[3] Tohoku Univ, New Ind Creat Hatchery Ctr, NICHe, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2005年 / 15卷 / 01期

关键词：

D O I：

10.1088/0960-1317/15/1/011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a fiber-optic Fabry-Perot interferometric pressure sensor of 125 mum in diameter and a detection system for medical use. A Fabry-Perot cavity is formed at an optical fiber end. A deformation of the diaphragm of the Fabry-Perot cavity induced by pressure varies the cavity length. White light interferometry is used to avoid error and noise caused by bending of the optical fiber and fluctuation of the light source. The reflection light of the sensor cavity is detected by a commercial high-speed spectrometer. A pressure change has been detected by using the developed sensor system. Animal experiments using a goat have been carried out and dynamic pressure changes in the internal pressure of heart and aorta have been successfully monitored.

引用

页码：71 / 75

页数：5

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