Observation of transient current induced in silicon carbide diodes by ion irradiation

被引:8
作者
Ohshima, T
Lee, KK
Onoda, S
Kamiya, T
Oikawa, M
Laird, JS
Hirao, T
Itoh, H
机构
[1] Japan Atom Energy Res Inst, Takasaki, Gumma 3701292, Japan
[2] Tokai Univ, Grad Sch Engn, Hiratsuka, Kanagawa 2591292, Japan
关键词
silicon carbide; transient ion beam induced current; heavy ion microbeam;
D O I
10.1016/S0168-583X(03)00906-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The high-speed current transients induced in SiC p-n diodes by 9 MeV Ni2+ and 12 MeV Ni3+ were measured using transient ion beam induced current (TIBIC). The amplitude of the TIBIC signals increases with increasing bias voltage. The transient current fall-time reduces with increasing bias voltage. These results are attributed to the increase in the electric field and the space-charge region with bias. However, the charge collection efficiency is below 100% even if the depletion width is greater than the Ni ion range. This can be attributed to the large nuclear stopping of Ni and recombination of the highly dense electron-hole pairs in the space-charge region. Our result indicates that pulse height defect (PHD) plays a significant role in the charge collection mechanism in these SiC p-n diodes for highly ionizing particles. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:979 / 983
页数:5
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