Detection of anisotropy in the electron velocity distribution produced by electron cyclotron resonance heating using the polarization of helium atom emission lines

被引：6

作者：

Teramoto, Tatsuya ^{[1
]}

Shikama, Taiichi ^{[1
]}

Ueda, Akira ^{[1
]}

Hasuo, Masahiro ^{[1
]}

机构：

[1] Kyoto Univ, Grad Sch Engn, Dept Mech Engn & Sci, Kyoto 6158540, Japan

来源：

APPLIED PHYSICS LETTERS | 2018年 / 112卷 / 21期

关键词：

IMPACT POLARIZATION; DISCHARGE PLASMA; MAGNETIC-FIELD; SPECTROSCOPY; PARAMETERS; RADIATION; ENERGY;

D O I：

10.1063/1.5031051

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The anisotropy in the electron velocity distribution (EVD) was measured using the polarization of two helium atom emission lines, 2(1)P-3(1)D (668 nm) and 2(3)P-3(3)D (588 nm), in a helium electron cyclotron resonance (ECR) discharge plasma. A small polarization degree of less than 4% was measured by adopting a temporal modulation technique. It was found that the polarization originated locally from around the ECR layer and that the anisotropic component of the EVD produced by ECR heating had an average kinetic energy of approximately 40 eV. Published by AIP Publishing.

引用

页数：5

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