Changes of chemical composition and structure of soft magnetic nanocrystalline Fe-Zr-N alloy under vacuum annealing

被引:16
作者
Bannykh, OA [1 ]
Sheftel, EN [1 ]
Krikunov, AI [1 ]
Kaputkin, DE [1 ]
Usmanova, GS [1 ]
Stroug, RE [1 ]
机构
[1] Russian Acad Sci, Baikov Inst Met & Mat Sci, Lab Struct Steels & Alloys 7, Moscow 117334, Russia
关键词
nanocrystalline materials; soft magnetic; magnetron sputtering; amorphous;
D O I
10.1016/S0304-8853(00)00299-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The amorphous soft magnetic alloys were produced by magnetron sputtering of Fe-8 at %Zr target in Ar and Ar + 10%N-2 atlnOSpheTL'S as films 1.5-2.5 mu m thick. X-ray diffraction analysis showed that annealing of the films resulted in formation of BCC Fe-based phase and additionally Fe,Zr in the Fe-Zr films. Amorphous phase in the Fe-Zr-N films is more thermostable in comparison with that in the Fe-Zr ones. X-ray spectrum microanalysis showed that nitrogen content in the Fe-Zr-N films decreases significantly during vacuum annealing. (C) 2000 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码:397 / 399
页数:3
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