Double window configuration as a low cost microwave waveguide window for plasma applications

Waveguide windows are major components of a transmission line used in microwave plasma devices. The function of the waveguide window is to provide vacuum isolation of the source side from the plasma chamber while transmitting microwaves with minimum attenuation. Commonly a single thin dielectric plate is sandwiched between a choke type flange and a flat flange and is used as a waveguide window. To arrive at a better window configuration in terms of the low power reflection coefficient, the voltage standing wave ratio calculation is carried out for different window configurations (single window and double window) and for various window thicknesses. It is found that the power reflection is the minimum in the case of double window configuration. The minimum power reflection is as low as 0.8% for a combination of alumina and a quartz plate each of 1 cm thickness in the double window configuration. Also, it is more advantageous to use radial microwave coupling than axial coupling in order to increase the life time of the microwave waveguide window. (C) 1997 American Institute of Physics.