Structural and optical properties of GaN nanocolumns grown on (0001) sapphire substrates by rf-plasma-assisted molecular-beam epitaxy

被引:75
作者
Sekiguchi, Hiroto [1 ]
Nakazato, Takuya [1 ]
Kikuchi, Akihiko [1 ]
Kishino, Katsumi [1 ]
机构
[1] Sophia Univ, Dept Elect & Elect Engn, Chiyoda Ku, Tokyo 1028554, Japan
关键词
nanostructures; molecular-beam epitaxy; gallium compounds; nitrides; semiconducting III-V materials;
D O I
10.1016/j.jcrysgro.2006.11.036
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaN nanocolumns were grown with AIN buffer layers on (0 0 0 1) sapphire substrates by rf-plasma-assisted molecular-beam epitaxy. The AIN buffer layers underneath the nanocolumns were used to nucleate the nanocrystals. The thickness of the AIN buffer layer affected the column configuration (size, shape), the density and the optical properties of the nanocolumns; when the thickness increased from 1.8 to 8.2 nm, the average column diameter gradually decreased from 150 to 52 nm with a small kink, but the column density peaked at a thickness of 3.2 nm at 5 x 10(9) cm(-2) and finally decreased to 2 x 10(8) cm(-2). Based on TEM observations, it is suggested that GaN nanocolumns were not grown just on AIN grain but on the edge of AIN grain. Further, the growth behavior of a nanocolumn as a function of AIN buffer layer thickness is suggested. The room-temperature photoluminescence intensity of the nanocolumns was maximized at a buffer thickness of 4.6 nm, where the intensity was 4 times stronger than that of high-quality bulk GaN crystals grown by HVPE with a threading dislocation density of similar to 8 x 10(6) cm(-2). (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:259 / 262
页数:4
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