Speckle correlation for the analysis of random processes at rough surfaces

被引:31
|
作者
Hinsch, KD [1 ]
Fricke-Begemann, T [1 ]
Gülker, G [1 ]
Wolff, K [1 ]
机构
[1] Carl von Ossietzky Univ, D-26111 Oldenburg, Germany
关键词
speckle; correlation; surface process; digital speckle photography; corrosion; laser ablation;
D O I
10.1016/S0143-8166(00)00035-X
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The importance of technological processes like corrosion, ablation or deposition causes interest in the quantitative monitoring of changes at rough surfaces. Thus, there is a need for effective methods to measure the statistical parameters characterizing changes in the profile or the material composition of such objects. The speckle field scattered from the surface is used as information carrier and its change is measured by correlation. This is realized by sophisticated data acquisition and digital processing techniques. An important issue is the interpretation of the correlation output in terms of statistical parameters describing the surface change. For many random surfaces a geometrical relation between surface profile and optical phase proves satisfactory. This allows to determine the standard deviation of the profile change. For a verification, speckle decorrelation in model surfaces of known deviation is measured. The paper introduces the speckle correlation concept, outlines some history and current setups and describes methods for data evaluation. The reliability of the quantitative interpretation of the speckle decorrelation is demonstrated. The method is illustrated by studies of metal corrosion and material removal in the cleaning of historical objects by laser ablation. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:87 / 105
页数:19
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