Nucleation and growth of GaN nanowires on Si(111) performed by molecular beam epitaxy

被引:239
作者
Calarco, Raffaella [1 ]
Meijers, Ralph J.
Debnath, Ratan K.
Stoica, Toma
Sutter, Eli
Luth, Hans.
机构
[1] Res Ctr Julich GmbH, Inst Bio & Nanosyst IBN 1, D-52425 Julich, Germany
[2] Res Ctr Julich GmbH, Ctr Nanoelect Syst Informat Technol, D-52425 Julich, Germany
[3] Brookhaven Natl Lab, Ctr Funct Nanomat, Upton, NY 11973 USA
关键词
D O I
10.1021/nl0707398
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
GaN nanowires (NWs) have been grown on Si(111) substrates by plasma-assisted molecular beam epitaxy (PAMBE). The nucleation process of GaN-NWs has been investigated in terms of nucleation density and wire evolution with time for a given set of growth parameters. The wire density increases rapidly with time and then saturates. The growth period until the nucleation of new nanowires is terminated can be defined as the nucleation stage. Coalescence of closely spaced nanowires reduces the density for long deposition times. The average size of the well-nucleated NWs shows linear time dependence in the nucleation stage. High-resolution transmission electron microscopy measurements of alternating GaN and AlN layers give valuable information about the length and radial growth rates for GaN and AlN in NWs.
引用
收藏
页码:2248 / 2251
页数:4
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