Quality factors of nonideal micro pillars

被引：15

作者：

Gregersen, N. ^{[1
]}

Nielsen, T. R. ^{[1
]}

Tromborg, B. ^{[1
]}

Mork, J. ^{[1
]}

机构：

[1] Tech Univ Denmark, Nano DTU, COM DTU, Dept Commun Opt & Mat, DK-2800 Lyngby, Denmark

来源：

APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 01期

关键词：

MICROCAVITIES;

D O I：

10.1063/1.2751586

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The influence of fabrication-induced imperfections and material absorption on the quality (Q) factor of a microcavity pillar is studied numerically. The dependence on sidewall inclination, selective underetch, and intrinsic loss is quantified. The authors show that imperfections can lead to an improvement in Q and that a sidewall inclination angle of less than 1 degrees causes a dramatic change in the Q factor. The variations in Q can be attributed to a delicate balance between effective index contrasts, mode overlap, and higher-order mode contributions. (c) 2007 American Institute of Physics.

引用

页数：3

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