High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams

被引：137

作者：

Bhuyan, M. K. ^{[1
]}

Courvoisier, F. ^{[1
]}

Lacourt, P. -A. ^{[1
]}

Jacquot, M. ^{[1
]}

Furfaro, L. ^{[1
]}

Withford, M. J. ^{[2
]}

Dudley, J. M. ^{[1
]}

机构：

[1] Univ Franche Comte, FEMTO ST Inst, Dept Opt PM Duffieux, UMR CNRS 6174, F-25030 Besancon, France

[2] Macquarie Univ, Dept Phys, CUDOS & MQ Photon, N Ryde, NSW 2109, Australia

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 02期

关键词：

LASER-PULSES; TRANSPARENT MATERIALS; SILICA GLASS; SURFACE; MICROSTRUCTURES; MICROFLUIDICS; FILAMENTATION; IRRADIATION; MOLECULES; CHANNELS;

D O I：

10.1364/OE.18.000566

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a systematic study of femtosecond laser microchannel machining in glass using nondiffracting Bessel beams. In particular, our results identify a source and focusing parameter working window where high aspect ratio taper-free microchannels can be reproducibly produced without sample translation. With appropriate source parameters, we machine channels of 2 mu m diameter and with aspect ratios up to 40. We propose the filamentation stability of the Bessel beam propagation as the critical factor underlying the controlled and reproducible results that have been obtained. (C) 2010 Optical Society of America

引用

页码：566 / 574

页数：9

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