Characterization of ZnO:Al thin films obtained by spray pyrolysis technique

被引：89
作者：
Rozati, S. M. [1 ]
Akesteh, Sh. [1 ]
机构：
[1] Univ Guilan, Dept Phys, Rasht 41335, Iran
来源：
MATERIALS CHARACTERIZATION | 2007年 / 58卷 / 04期
关键词：
ZnO; ZnO : Al; spray pyrolysis; ZINC-OXIDE; FLUORINE;
D O I：
10.1016/j.matchar.2006.05.012
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Films of zinc oxide doped with Al (ZnO:Al) are prepared using the spray pyrolysis technique. The effect of doping Al on the physical properties of ZnO:AI is studied. In this study the polycrystalline ZnO:AI films with the different Al concentration ([Al]/ [Zn] in the starting solution was varied from 0 to 0.6 wt.%) were prepared. These films were confirmed to show the high crystallinity by X-ray diffraction technique. The smallest sheet resistance value, around 207 Omega/square, was obtained using a [Al]/[Zn] ratio of 0.125 wt.% in starting solution. The optical transmittance was about 75% in visible range for the optimum film. (c) 2006 Elsevier Inc. All rights reserved.
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收藏
页码：319 / 322
页数：4
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