Fundamental investigation of micro wear rate using an atomic force microscope

被引：92
作者：
Chung, KH [1 ]
Kim, DE [1 ]
机构：
[1] Yonsei Univ, Dept Mech Engn, Seoul 120749, South Korea
来源：
TRIBOLOGY LETTERS | 2003年 / 15卷 / 02期
关键词：
adhesion; AFM; tip wear; wear rate;
D O I：
10.1023/A:1024457132574
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
Micro-wear characteristics of Si and Si3N4 tips and the surfaces of Au, Cu, DLC, and bare Si were investigated using an Atomic Force Microscope (AFM). The range of applied load was between 10 to 800 nN. It was found that the wear coefficient values were between 10(-3) to 10(-1) and 10(-5) to 10(-4) for Si and Si3N4 tip, respectively. The experimentally obtained wear rates were comparable to those of the macro-scale systems. Also, evidence of micro-plastic deformation could be found on the wear track.
引用
收藏
页码：135 / 144
页数：10
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