Silicon Micro-gyroscope Closed-Loop Correction and Frequency Tuning Control

被引：0

作者：

Wang, Xingjun ^{[1
,2
]}

Yang, Bo ^{[1
,2
]}

Dai, Bo ^{[1
,2
]}

Deng, Yunpeng ^{[1
,2
]}

Hu, Di ^{[1
,2
]}

机构：

[1] Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Jiangsu, Peoples R China

[2] Minist Educ, Key Lab Microinertial Instrument & Adv Nav Techno, Nanjing 210096, Jiangsu, Peoples R China

来源：

WEARABLE SENSORS AND ROBOTS | 2017年 / 399卷

基金：

中国国家自然科学基金;

关键词：

Quadrature error; Frequency tuning; Mode-matched; PID; Closed-loop;

D O I：

10.1007/978-981-10-2404-7_26

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the improved performance of silicon micro-gyroscope under closed-loop correction and frequency tuning. First, this paper analyzes the source of the quadrature error in the micro-gyroscope. Second, the mode-matching state of the silicon vibratory gyroscope is studied. The sense mode resonant frequency is tuned to be closed to the drive mode resonant frequency under the mode-matched condition. Then, the closed-loop system correction is realized under the mode-matched condition and the proportion-integral differential correction with a passive impedance network. Finally, the experiment results demonstrate the feasibility of the closed-loop system correction scheme under the mode-matched condition.

引用

页码：321 / 331

页数：11

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