The universality of NBTI relaxation and its implications for modeling and characterization

被引:130
作者
Grasser, Tibor [1 ]
Goes, Wolfgang [1 ]
Sverdlov, Victor [2 ]
Kaczer, Ben [3 ]
机构
[1] Christian Doppler Lab TCAD, Gusshausstr 27-29, A-1040 Vienna, Austria
[2] TU Wein, Inst Microelect, A-1040 Vienna, Austria
[3] IMEC, B-3001 Leuven, Belgium
来源
2007 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 45TH ANNUAL | 2007年
关键词
D O I
10.1109/RELPHY.2007.369904
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
As of date many NBTI models have been published which aim to successfully capture the essential physics [1-5]. As such, these models have mostly focused on the stress phase. The relaxation phase, on the other hand, has not received as much attention, possibly because of the contradictory results published so far. Particularly noteworthy are the very long relaxation tails of almost logarithmic nature [5-7], which cannot be successfully described by the reaction-diffusion model [7]. We argue that understanding the nature of the relaxation phase could hold the key to unraveling the underlying NBTI mechanism. In particular, we stipulate that the relaxation phase follows a universal relaxation 'law' [6,8-10], demonstrate the valuable consequences resulting therefrom, and use this universality to classify presently available NBTI models.
引用
收藏
页码:268 / +
页数:3
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