Quartz and GaPO4 pressure transducers for high resolution applications in high temperature: a simulation approach

被引:0
|
作者
Silva, Leonardo B. M. [1 ]
Santos, Edval J. P. [1 ]
机构
[1] Univ Fed Pernambuco, Lab Devices & Nanostruct LDN NE2N, BR-50740530 Recife, PE, Brazil
来源
2014 29TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO) | 2014年
关键词
Quality factor; Quartz; Gallium Phosphate; transducer; COMSOL; high resolution; temperature; pressure;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An accurate computer model was created for the extraction of the quality factor, Q, and the sensitivity of piezoelectric pressure transducer. The quality factor is a key parameter to determine the transducer resolution. The effect of viscosity loss and geometrical factors, such as: thickness, diameter, and concavity (plano-convex and bi-convex) are simulated in AT-cut quartz and Hi-Q cut gallium phosphate (GaPO4) materials. AT-cut quartz is a standard material in this type of application, and gallium phosphate is a promising material for advanced pressure transducer. The goal is to evaluate device specifications to achieve the highest Q-factor (Q > 10(6)) at frequencies up to 10 MHz. Temperature dependent elastic constants and boundary load conditions are used to simulate temperature and hydrostatic pressure effects on the vibrating transducer. The frequency shift is simulated in the range of 25 degrees C to 200 degrees C and 14.7 psi to 20,000 psi for temperature and pressure, respectively. The simulation results allows for a resolution of 1 psi for a frequency resolution of 1 ppm. All simulations are carried out with COMSOL Multi physics software, version 4.4.
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页数:4
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