Planar Circuits for Non-contact Near-Field Microwave Probing

被引:0
作者
Chisum, Jonathan D. [1 ]
Ramirez-Velez, Mabel [1 ]
Popovic, Zoya [1 ]
机构
[1] Univ Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USA
来源
2009 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3 | 2009年
关键词
MICROSCOPY;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a planar microwave probe circuit for non-contact near-field probing of quasi-planar structures which can be made of metal, dielectric or semiconductor. The probe circuit demonstrated here consists of a high-Q resonator in the range between 900 MHz and 5GHz hybridly integrated with a microstrip circuit and field-concentrating micro-meter size probe tip which determines the spatial resolution of the detection process. The design of the probe circuit and measurement system are presented, along with measurements of a GaAs test circuit and a Si CMOS chip. By scanning the probe above a quasi-planar sample, two-dimensional data sets of complex S-parameters are obtained and appropriate processing is applied to extract information about the sample.
引用
收藏
页码:802 / 805
页数:4
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