Planar Circuits for Non-contact Near-Field Microwave Probing
被引:0
作者:
Chisum, Jonathan D.
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h-index: 0
机构:
Univ Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USAUniv Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USA
Chisum, Jonathan D.
[1
]
Ramirez-Velez, Mabel
论文数: 0引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USAUniv Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USA
Ramirez-Velez, Mabel
[1
]
Popovic, Zoya
论文数: 0引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USAUniv Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USA
Popovic, Zoya
[1
]
机构:
[1] Univ Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USA
来源:
2009 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3
|
2009年
关键词:
MICROSCOPY;
D O I:
暂无
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
This paper presents a planar microwave probe circuit for non-contact near-field probing of quasi-planar structures which can be made of metal, dielectric or semiconductor. The probe circuit demonstrated here consists of a high-Q resonator in the range between 900 MHz and 5GHz hybridly integrated with a microstrip circuit and field-concentrating micro-meter size probe tip which determines the spatial resolution of the detection process. The design of the probe circuit and measurement system are presented, along with measurements of a GaAs test circuit and a Si CMOS chip. By scanning the probe above a quasi-planar sample, two-dimensional data sets of complex S-parameters are obtained and appropriate processing is applied to extract information about the sample.
机构:
Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
Gao, C
Xiang, XD
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h-index: 0
机构:
Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Gao, C
Wei, T
论文数: 0引用数: 0
h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Wei, T
Duewer, F
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h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Duewer, F
Lu, YL
论文数: 0引用数: 0
h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Lu, YL
Xiang, XD
论文数: 0引用数: 0
h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
机构:
Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
Gao, C
Xiang, XD
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Gao, C
Wei, T
论文数: 0引用数: 0
h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Wei, T
Duewer, F
论文数: 0引用数: 0
h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Duewer, F
Lu, YL
论文数: 0引用数: 0
h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
Lu, YL
Xiang, XD
论文数: 0引用数: 0
h-index: 0
机构:
UNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USAUNIV CALIF BERKELEY, LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA