Morphology and structure of polymer fluorocarbon coatings on polyimide by sputtering

被引：12

作者：

Qi, Hongjin ^{[1
]}

Zhang, Yuhui

Di, Jianfeng

Du, Wenqin

机构：

[1] Wuyi Univ, Dept Text Engn & Clothing, Jiangmen 529020, Peoples R China

[2] Qingdao Univ, Inst Chem Engn, Qingdao 266071, Peoples R China

[3] Donghua Univ, Inst Mat Sci & Engn, Shanghai 200051, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2007年 / 201卷 / 9-11期

关键词：

growth models; SEM; sputtering; polyimide; double nano-structure; hydrophobicity;

D O I：

10.1016/j.surfcoat.2006.07.222

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A series of polymeric fluorocarbon coatings have been deposited on polyimide (PI) substrate by RIF magnetron sputtering polytetrafluoroethylene (PTFE) target. A study on sputtering parameter dependence of the morphology, molecular structure and hydrophobicity of the coatings has been made. Analysis of XPS indicates that the coatings are highly crosslinked-unsaturated and the low ratios of fluorine to carbon are remarkably influenced by power and slightly affected by pressure. The double nanosized gain-pore coating surface in the double polymer target-substrate system can be expected to greatly enhance the solvent-resistance and hydrophobicity. (C) 2006 Elsevier B.V. All rights reserved.

引用

页码：5522 / 5525

页数：4

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