A new micromachined bandpass filter on a quartz substrate

被引：1
|
作者：
Park, KY
Park, JY
Lee, JC
Park, JY
Kim, GH
Kim, DW
Bu, JU
Chung, KW
机构：
[1] Kwangwoon Univ, Dept Radio Sci & Engn, RFIC Res & Educ Ctr, Seoul 139701, South Korea
[2] LG Corp Inst Technol, Microsyst Team, Seoul 137140, South Korea
[3] LG Corp Inst Technol, Mat & Devices Lab, RF Team, Seoul 137140, South Korea
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2000年 / 39卷 / 6B期
关键词：
bandpass filter; micromachining; K-band; MMIC;
D O I：
10.1143/JJAP.39.L638
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new class of three dimensional(3D) micromachined microwave planar filter at K-band is presented. The filter. shows a wide bandpass chracteristic of 36% with the insertion loss of 1.2 dB at 19.11 GHz, and can be applicable in high power monolithic microwave integrated circuits (MMIC).
引用
收藏
页码：L638 / L640
页数：3
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