Transformation of amorphous TiO2 to a hydronium oxofluorotitanate and applications as an HF sensor

被引：12

作者：

Appelhans, Leah N. ^{[1
]}

Finnegan, Patrick S. ^{[1
]}

Massey, Lee T. ^{[1
]}

Luk, Ting S. ^{[1
,2
]}

Rodriguez, Mark A. ^{[1
]}

Brumbach, Michael T. ^{[1
]}

McKenzie, Bonnie ^{[1
]}

Craven, Julia M. ^{[1
]}

机构：

[1] Sandia Natl Labs, POB 5800,Mail Stop 0888, Albuquerque, NM 87185 USA

[2] Sandia Natl Labs, Ctr Integrated Nanotechnol CINT SNL, POB 5800, Albuquerque, NM 87185 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2016年 / 228卷

关键词：

Hydrofluoric acid; Titania; Oxyfluoride; HF sensor; Polarimetry; HYDROFLUORIC-ACID; INTERFEROMETER; GAS; MICROCANTILEVER; POWDERS;

D O I：

10.1016/j.snb.2015.12.068

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Amorphous titania thin films were examined for use as the active material in a polarimetry based HF sensor. The amorphous titania films were found to be sensitive to vapor phase HF and the reaction product was identified as a hydronium oxofluorotitanate phase, which has previously only been synthesized in aqueous solution. The extent of reaction varied both with vapor phase HF concentration, relative humidity, and the exposure time. HF concentrations as low as 1 ppm could be detected for exposure times of 120 h. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：117 / 123

页数：7

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