Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

被引：70
作者：
Zhang, Jianhao [1 ,2 ]
Fang, Zhiwei [3 ,4 ]
Lin, Jintian [1 ]
Zhou, Junxia [3 ,4 ]
Wang, Min [3 ,4 ]
Wu, Rongbo [1 ,2 ]
Gao, Renhong [1 ,2 ]
Cheng, Ya [1 ,3 ,4 ,5 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China
[4] East China Normal Univ, Sch Phys & Mat Sci, Extreme Optoelectromech Lab, Shanghai 200241, Peoples R China
[5] Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Shanxi, Peoples R China
来源：
NANOMATERIALS | 2019年 / 9卷 / 09期
基金：
国家重点研发计划; 中国国家自然科学基金;
关键词：
lithium niobate microdisk resonator; controllable wedge angle; high quality factors; chemo-mechanical polish; RESONATORS; PHOTONICS;
D O I：
10.3390/nano9091218
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 x 10(7) can be obtained and the wedge angle of the LNOI can be continuously tuned from 9 degrees to 51 degrees.
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页数：7
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共 19 条
  • [1] Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits
    Boes, Andreas
    Corcoran, Bill
    Chang, Lin
    Bowers, John
    Mitchell, Arnan
    [J]. LASER & PHOTONICS REVIEWS, 2018, 12 (04)
  • [2] Real-time electrical tuning of an optical spring on a monolithically integrated ultrahigh Q lithium nibote microresonator
    Fang, Zhiwei
    Haque, Sanaul
    Lin, Jintian
    Wu, Rongbo
    Zhang, Jianhao
    Wang, Min
    Zhou, Junxia
    Rafa, Muniyat
    Lu, Tao
    Cheng, Ya
    [J]. OPTICS LETTERS, 2019, 44 (05) : 1214 - 1217
  • [3] Silicon photonics: from a microresonator perspective
    Feng, Shaoqi
    Lei, Ting
    Chen, Hui
    Cai, Hong
    Luo, Xianshu
    Poon, Andrew W.
    [J]. LASER & PHOTONICS REVIEWS, 2012, 6 (02) : 145 - 177
  • [4] Whispering gallery mode sensors
    Foreman, Matthew R.
    Swaim, Jon D.
    Vollmer, Frank
    [J]. ADVANCES IN OPTICS AND PHOTONICS, 2015, 7 (02): : 168 - 240
  • [5] Guoping Lin, 2019, Optical Materials: X, V2, DOI 10.1016/j.omx.2019.100017
  • [6] Whispering-gallery microcavities with unidirectional laser emission
    Jiang, Xue-Feng
    Zou, Chang-Ling
    Wang, Li
    Gong, Qihuang
    Xiao, Yun-Feng
    [J]. LASER & PHOTONICS REVIEWS, 2016, 10 (01) : 40 - 61
  • [7] Cavity optomechanics: Back-action at the mesoscale
    Kippenberg, T. J.
    Vahala, K. J.
    [J]. SCIENCE, 2008, 321 (5893) : 1172 - 1176
  • [8] High-quality lithium niobate photonic crystal nanocavities
    Liang, Hanxiao
    Luo, Rui
    He, Yang
    Jiang, Haowei
    Lin, Qiang
    [J]. OPTICA, 2017, 4 (10): : 1251 - 1258
  • [9] Nonlinear photonics with high-Q whispering-gallery-mode resonators
    Lin, Guoping
    Coillet, Aurelien
    Chembo, Yanne K.
    [J]. ADVANCES IN OPTICS AND PHOTONICS, 2017, 9 (04): : 828 - 890
  • [10] Broadband Quasi-Phase-Matched Harmonic Generation in an On-Chip Monocrystalline Lithium Niobate Microdisk Resonator
    Lin, Jintian
    Yao, Ni
    Hao, Zhenzhong
    Zhang, Jianhao
    Mao, Wenbo
    Wang, Min
    Chu, Wei
    Wu, Rongbo
    Fang, Zhiwei
    Qiao, Lingling
    Fang, Wei
    Bo, Fang
    Cheng, Ya
    [J]. PHYSICAL REVIEW LETTERS, 2019, 122 (17)
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