Sol-gel processed silica/titania/y-glycidoxypropyltrimethoxysilane composite materials for photonic applications

被引:15
作者
Que, WX [1 ]
Zhou, Y [1 ]
Lam, YL [1 ]
Chan, YC [1 ]
Tan, HT [1 ]
Tan, TH [1 ]
Kam, CH [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词
sol-gel process; composite; thin film; spectroscopy; waveguide;
D O I
10.1007/s11664-000-0172-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Silica/titania/y-Glycidoxypropyltrimethoxysilane composite materials processed by the sol-gel technique were studied for photonic applications. Waveguide thin films with thickness more than 1.7 mu m were prepared by the sol-gel spin coating technique and low temperature heat treatment from this high titanium content composite materials. The films were analyzed by atomic force microscopy (AFM), ellipsometry, differential thermal analysis (DTA), thermal gravimetric analysis (TGA), UV-visible spectroscopy (UV-VIS), and Fourier transform infrared (FT-IR) spectroscopy. It was observed that the film becomes thinner as the titanium contents increase. A change of the refractive index through the range 1.52-1.61 at the optical wavelength of 633 nm was achieved by varying the molar ratio between silica and titanium. A dense, low absorption, and high transparency in the visible range waveguide films could be obtained at a low temperature. It was also noted that organic compounds in the film would decompose in the temperature range from 200 degrees C to 480 degrees C. Accordingly, purely inorganic silica-titania films with a thickness of about 0.7 mu m could also be obtained by a single-coating process, when the film was baked at a temperature of 500 degrees C or higher. The waveguides properties and photonic applications of the composite material sol-gel films were also investigated.
引用
收藏
页码:1052 / 1058
页数:7
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