Higher-order aberration corrector for an image-forming system in a transmission electron microscope

被引：36

作者：

Sawada, H. ^{[1
,2
]}

Sasaki, T. ^{[1
,2
]}

Hosokawa, F. ^{[1
]}

Yuasa, S. ^{[1
]}

Terao, M. ^{[1
]}

Kawazoe, M. ^{[1
]}

Nakamichi, T. ^{[1
]}

Kaneyama, T. ^{[1
,2
]}

Kondo, Y. ^{[2
]}

Kimoto, K. ^{[2
,3
]}

Suenaga, K. ^{[2
,4
]}

机构：

[1] JEOL Ltd, Tokyo 1968558, Japan

[2] Japan Sci & Technol Agcy, CREST, Chiyoda Ku, Tokyo 1020075, Japan

[3] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, Japan

[4] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Carbon Mat, Tsukuba, Ibaraki 3058565, Japan

来源：

ULTRAMICROSCOPY | 2010年 / 110卷 / 08期

基金：

日本科学技术振兴机构;

关键词：

Six-fold astigmatism; Diffractogram tableau; Aberration correction;

D O I：

10.1016/j.ultramic.2010.01.010

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We developed a new electron optical system with three dodecapoles to compensate for spherical aberration and six-fold astigmatism, which generally remains in a two-hexapole type corrector. In this study, we applied the corrector for image-forming system in transmission electron microscope. Compensation for higher-order aberration was demonstrated through a diffractogram tableau using a triple three-fold astigmatism field system, which was then compared with a double hexapole field system. Using this electron optical system, six-fold astigmatism was measured to be less than 0.1 mm at an acceleration voltage of 60 kV, showing that the system successfully compensated for six-fold astigmatism. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：958 / 961

页数：4

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