Characterization of a hybrid laser-assisted mechanical micromachining (LAMM) process for a difficult-to-machine material

被引:63
作者
Singh, Ramesh [1 ]
Melkote, Shreyes N. [1 ]
机构
[1] Georgia Inst Technol, George W Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
关键词
micromachining; laser assisted; micro-grooving; hard material;
D O I
10.1016/j.ijmachtools.2006.09.004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Mechanical micro-cutting is emerging as a viable alternative to lithography based micromachining techniques for applications in optics, semiconductors and micro-mold/dies. However, certain factors limit the types of workpiece materials that can be processed using mechanical micromachining methods. For difficult-to-machine materials such as mold and die steels or ceramics, limited cutting tool/machine stiffness and strength are major impediments to the efficient use of mechanical micromachining methods. In addition, at micron length scales of cutting, the effect of tool/machine deflection on the dimensional accuracy of the machined feature can be significant. This paper presents experimental characterization of a novel hybrid laser assisted mechanical micromachining (LAMM) process designed for 3D micro-grooving that involves highly localized thermal softening of the hard material by focusing a solid-state continuous wave laser beam in front of a miniature cutting tool. Micro-scale grooving experiments are conducted on H-13 mold steel (42 HRc) in order to understand the influence of laser variables and cutting parameters on the cutting forces, groove depth and surface finish. The results show that the laser variables significantly influence the process response. Specifically, the mean thrust force is found to decrease by 17% and the 3D average surface roughness increases by 36% when the laser power is increased from 0 to 10 W. The groove depths are found to be influenced by the machine (stage) deflection and tool thermal expansion, which affect the actual depth of cut, in the presence of laser heating. In particular, it is found that the accuracy of groove depth improves with laser heating. Explanations for the observed trends are given. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1139 / 1150
页数:12
相关论文
共 24 条
[1]  
Cox D., 2004, PACE MANUAL THERAPIS, P1
[2]   Plasma assisted milling of heat-resistant superalloys [J].
de Lacalle, LNL ;
Sánchez, JA ;
Lamikiz, A ;
Celaya, A .
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2004, 126 (02) :274-285
[3]   Metallographical analysis of steel and hard metal substrates after deep-drilling with feratosecond laser pulses [J].
Dumitru, G ;
Romano, V ;
Weber, HP ;
Sentis, M ;
Hermann, J ;
Bruneau, S ;
Marine, W ;
Haefke, H ;
Gerbig, Y .
APPLIED SURFACE SCIENCE, 2003, 208 :181-188
[4]   Femtosecond laser ablation for microfluidics -: art. no. 051105 [J].
Gómez, D ;
Tekniker, F ;
Goenaga, I ;
Lizuain, I ;
Ozaita, M .
OPTICAL ENGINEERING, 2005, 44 (05) :1-8
[5]   Laser milling - A practical industrial solution for machining a wide variety of materials [J].
Henry, M ;
Harrison, PM ;
Henderson, I ;
Brownell, M .
FIFTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2004, 5662 :627-632
[6]   Surface and bulk ultra-short pulsed laser processing of transparent materials [J].
Hertel, IV ;
Stoian, R ;
Ashkenasi, D ;
Rosenfeld, A ;
Campbell, EEB .
1ST INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2000, 4088 :17-24
[7]  
HIROSHI A, 2005, P SOC PHOTO-OPT INS, V5603, P418
[8]   General solutions for stationary/moving plane heat source problems in manufacturing and tribology [J].
Hou, ZB ;
Komanduri, R .
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2000, 43 (10) :1679-1698
[9]  
HSU TR, 2002, MEMS MICROSYSTEMS DE
[10]  
Jeon Y., 2005, P IMECE 2005 ASME IN, P1