Ferroelectricity in Si-Doped HfO2 Revealed: A Binary Lead-Free Ferroelectric

被引:156
作者
Martin, Dominik [1 ]
Mueller, Johannes [2 ]
Schenk, Tony [1 ]
Arruda, Thomas M. [3 ]
Kumar, Amit [3 ]
Strelcov, Evgheni [3 ]
Yurchuk, Ekaterina [1 ]
Mueller, Stefan [1 ]
Pohl, Darius [4 ]
Schroeder, Uwe [1 ]
Kalinin, Sergei V. [3 ]
Mikolajick, Thomas [1 ,5 ]
机构
[1] Namlab gGmbH, D-01187 Dresden, Germany
[2] Fraunhofer IPMS CNT, D-01099 Dresden, Germany
[3] Oak Ridge Natl Lab, Imaging & Nanoscale Characterizat Grp, Ctr Nanophase Mat Sci, Oak Ridge, TN 37831 USA
[4] Leibniz Inst Solid State & Mat Res IFW Dresden, Inst Metall Mat, D-01171 Dresden, Germany
[5] Tech Univ Dresden, Chair Nanoelect Mat, D-01062 Dresden, Germany
关键词
POLARIZATION; SILICON; FILMS;
D O I
10.1002/adma.201403115
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
(Graph Presented) Static domain structures and polarization dynamics of silicon doped HfO2 are explored. The evolution of ferroelectricity as a function of Si-doping level driving the transition from paraelectricity via ferroelectricity to antiferroelectricity is investigated. Ferroelectric and antiferroelectric properties can be observed locally on the pristine, poled and electroded surfaces, providing conclusive evidence to intrinsic ferroic behavior. © 2014 Wiley-VCH Verlag GmbH & Co. KGaA.
引用
收藏
页码:8198 / 8202
页数:5
相关论文
共 30 条
  • [1] Ferroelectricity in hafnium oxide thin films
    Boescke, T. S.
    Mueller, J.
    Braeuhaus, D.
    Schroeder, U.
    Boettger, U.
    [J]. APPLIED PHYSICS LETTERS, 2011, 99 (10)
  • [2] The high-k solution
    Bohr, Mark T.
    Chau, Robert S.
    Ghani, Tahir
    Mistry, Kaizad
    [J]. IEEE SPECTRUM, 2007, 44 (10) : 29 - 35
  • [3] Microstructure and electrical properties of (120)O-oriented and of (001)O-oriented epitaxial antiferroelectric PbZrO3 thin films on (100) SrTiO3 substrates covered with different oxide bottom electrodes
    Boldyreva, Ksenia
    Bao, Dinghua
    Le Rhun, Gwenael
    Pintilie, Lucian
    Alexe, Marin
    Hesse, Dietrich
    [J]. JOURNAL OF APPLIED PHYSICS, 2007, 102 (04)
  • [4] Migration of oxygen vacancy in HfO2 and across the HfO2/SiO2 interface:: A first-principles investigation
    Capron, Nathalie
    Broqvist, Peter
    Pasquarello, Alfredo
    [J]. APPLIED PHYSICS LETTERS, 2007, 91 (19)
  • [5] Chun-Hu C., 2014, ELECT DEVICE LETT IE, V35, P138
  • [6] Clima S., 2014, APPL PHYS LETT, P104
  • [7] Switching of ferroelectric polarization in epitaxial BaTiO3 films on silicon without a conducting bottom electrode
    Dubourdieu, Catherine
    Bruley, John
    Arruda, Thomas M.
    Posadas, Agham
    Jordan-Sweet, Jean
    Frank, Martin M.
    Cartier, Eduard
    Frank, David J.
    Kalinin, Sergei V.
    Demkov, Alexander A.
    Narayanan, Vijay
    [J]. NATURE NANOTECHNOLOGY, 2013, 8 (10) : 748 - 754
  • [8] Tuning the dielectric properties of hafnium silicate films
    Fachmann, Christian
    Frey, Lothar
    Kudelka, Stephan
    Boescke, Tim
    Nawka, Stefan
    Erben, Elke
    Doll, Theodor
    [J]. MICROELECTRONIC ENGINEERING, 2007, 84 (12) : 2883 - 2887
  • [9] Ultrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications
    Gusev, EP
    Cabral, C
    Copel, M
    D'Emic, C
    Gribelyuk, M
    [J]. MICROELECTRONIC ENGINEERING, 2003, 69 (2-4) : 145 - 151
  • [10] LOCAL POLING OF FERROELECTRIC POLYMERS BY SCANNING FORCE MICROSCOPY
    GUTHNER, P
    DRANSFELD, K
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (09) : 1137 - 1139