Modeling and modal analysis on capacitive micromachined ultrasound transducers

被引：1
|
作者：
Li, Yan [1 ]
Zhang, Peiyu [1 ]
机构：
[1] Henan Univ, Sch Phys & Elect, Kaifeng, Peoples R China
来源：
INDUSTRIAL ENGINEERING AND APPLIED RESEARCH | 2014年 / 620卷
关键词：
Combine capacitive micromachined ultrasound transducers; Resonant analysis; MEMS;
D O I：
10.4028/www.scientific.net/AMM.620.300
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The capacitive micromachined ultrasonic transducers with square and rectangular membranes were modeled for FEM simulation. The membrane is modeled as a thin plate clamped on all sides. Resonant frequencies and vibration modal analysis were carried out. The modes of CMUT with square and rectangular membranes are different. It can be basis for building CMUTs' structure. Moreover, the resonant frequencies will vary with different side length and ratio of length/width of membrane.
引用
收藏
页码：300 / 303
页数：4
相关论文
共 50 条
  • [1] Characterization and Modeling of Capacitive Micromachined Ultrasound Transducers for Diagnostic Ultrasound
    Doody, C. B.
    Wadhwa, J. S.
    Lemmerhirt, D. F.
    White, R. D.
    NSTI NANOTECH 2008, VOL 3, TECHNICAL PROCEEDINGS: MICROSYSTEMS, PHOTONICS, SENSORS, FLUIDICS, MODELING, AND SIMULATION, 2008, : 627 - +
  • [2] CHARACTERIZATION AND MODELING OF CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS FOR DIAGNOSTIC ULTRASOUND
    Doody, Christopher B.
    White, Robert D.
    Wadhwa, Jaspreet S.
    Lemmerhirt, David F.
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 13, PTS A AND B, 2009, : 287 - +
  • [3] Modeling and Characterization of CMOS-Fabricated Capacitive Micromachined Ultrasound Transducers
    Doody, Christopher B.
    Cheng, Xiaoyang
    Rich, Collin A.
    Lemmerhirt, David F.
    White, Robert D.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 20 (01) : 104 - 118
  • [4] Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging
    Jiaqi Wang
    Zhou Zheng
    Jasmine Chan
    John T. W. Yeow
    Microsystems & Nanoengineering, 6
  • [5] Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging
    Wang, Jiaqi
    Zheng, Zhou
    Chan, Jasmine
    Yeow, John T. W.
    MICROSYSTEMS & NANOENGINEERING, 2020, 6 (01)
  • [6] Ultrasound contrast imaging with capacitive micromachined ultrasound transducers
    Bouakaz, A.
    Ferin, G.
    Certon, D.
    Basset, O.
    IRBM, 2011, 32 (02) : 102 - 105
  • [7] Analysis of Collapse-Snapback Phenomena in Capacitive Micromachined Ultrasound Transducers
    Halbach, Chloe
    Rochus, Veronique
    Genoe, Jan
    Rottenberg, Xavier
    Cheyns, David
    Heremans, Paul
    MICROMACHINES, 2025, 16 (02)
  • [8] Exploitation of Capacitive Micromachined Transducers for Nonlinear Ultrasound Imaging
    Novell, Anthony
    Legros, Mathieu
    Felix, Nicolas
    Bouakaz, Ayache
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2009, 56 (12) : 2733 - 2743
  • [9] Capacitive Micromachined Ultrasonic Transducers for Therapeutic Ultrasound Applications
    Wong, Serena H.
    Kupnik, Mario
    Watkins, Ronald D.
    Butts-Pauly, Kim
    Khuri-Yakub, Butrus T.
    IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 2010, 57 (01) : 114 - 123
  • [10] Dynamic and Acoustic Modeling of Capacitive Micromachined Ultrasonic Transducers
    Berthillier, Marc
    Le Moal, Patrice
    Lardies, Joseph
    2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2011, : 608 - 611
12345