MOEMS translatory actuator characterisation, position encoding and closed-loop control

被引：2

作者：

Lenzhofer, M. ^{[1
]}

Tortschanoff, A. ^{[1
]}

Frank, A. ^{[1
]}

Sandner, T. ^{[2
]}

Schenk, H. ^{[2
]}

Kraft, M. ^{[1
]}

Kenda, A. ^{[1
]}

机构：

[1] Ctr Carinthian Tech Res AG, A-9524 Villach, Austria

[2] Fraunhofer Inst Photon Microsyst, D-01109 Dresden, Germany

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2010年 / 16卷 / 05期

关键词：

FOURIER-TRANSFORM SPECTROMETER;

D O I：

10.1007/s00542-010-1029-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recent developments in optical micro-electro-mechanical systems (MEMS) have produced rapidly oscillating translatory micro-mirrors with out-of-plane mirror displacements exceeding +/- 100 mu m, which have a great potential for various applications requiring high-speed optical path difference modulation. A key factor affecting their practical applicability is a reliable operation control of the MEMS element. Presented here is a pro-active solution combining a laser reference interferometer with a novel position detection scheme and a dedicated control circuitry. By demodulating and processing the laser reference signal, the zero-crossing point of the moving MEMS device can be detected with an accuracy of one interference fringe only. This allows generating a highly accurate mirror control signal in real-time, enabling the implementation of a unique closed-loop control of such MEMS devices and thus ensuring optimally stable MEMS operation and maximal mechanical amplitudes even under varying environmental conditions. The presented solution so provides a vital step forward in the real-world deployment of optical systems using translatory micro-devices.

引用

页码：901 / 907

页数：7