Quartz Crystal Microbalance (QCM) used as humidity sensor

被引:98
作者
Pascal-Delannoy, F [1 ]
Sorli, B [1 ]
Boyer, A [1 ]
机构
[1] Univ Montpellier 2, UMR 5507 CNRS, Ctr Electron & Microoptoelect Montpellier, F-34095 Montpellier 05, France
关键词
humidity sensor; Quartz Crystal Microbalance;
D O I
10.1016/S0924-4247(00)00391-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes an application of Quartz Crystal Microbalance (QCM) used as humidity sensor. Moisture apparition is detected by using a QCM associated with a Peltier module. When water condensation produced by the Peltier cooling appears on the QCM, a change of mass on the crystal sensitive surface results in the decrease of the resonant frequency. If we measure the delay time between the beginning of Peltier supply and the apparition of water condensation on the quartz, we determine the relative humidity and the condensation velocity. A study of thermal transfer is first presented. Relative humidity measurements are then realised in a climatic chamber. A theoretical approach is finally compared with the experimental results. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:285 / 291
页数:7
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