Electronic structure and mechanical properties of ternary ZrTaN alloys studied by ab initio calculations and thin-film growth experiments

被引:51
作者
Abadias, G. [1 ]
Kanoun, M. B. [2 ]
Goumri-Said, S. [3 ,4 ]
Koutsokeras, L. [1 ,5 ]
Dub, S. N. [6 ]
Djemia, Ph. [7 ]
机构
[1] Univ Poitiers, ENSMA, SP2MI, CNRS,Inst P,Dept Phys & Mecan Mat, F-86962 Futuroscope, France
[2] Georgia Inst Technol, Sch Phys, Atlanta, GA 30332 USA
[3] Georgia Inst Technol, Sch Chem & Biochem, Atlanta, GA 30332 USA
[4] Georgia Inst Technol, Ctr Organ Photon & Elect, Atlanta, GA 30332 USA
[5] Univ Ioannina, Dept Mat Sci & Engn, Ioannina 45110, Greece
[6] NAS Ukraine, Inst Superhard Mat, UA-04074 Kiev, Ukraine
[7] Univ Paris 13, Sorbonne Paris Cite, CNRS, UPR 3407,Lab Sci Proc & Mat, F-93430 Villetaneuse, France
关键词
TRANSITION-METAL NITRIDES; TI-TA-N; ELASTIC PROPERTIES; PREFERRED ORIENTATION; NANOCOMPOSITE COATINGS; PHASE-STABILITY; 1ST PRINCIPLES; SINGLE-CRYSTAL; HARD COATINGS; ZR-N;
D O I
10.1103/PhysRevB.90.144107
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The structure, phase stability, and mechanical properties of ternary alloys of the Zr-Ta-N system are investigated by combining thin-film growth and ab initio calculations. Zr1-xTaxN films with 0 <= x <= 1 were deposited by reactive magnetron cosputtering in Ar + N-2 plasma discharge and their structural properties characterized by x-ray diffraction. We considered both ordered and disordered alloys, using supercells and special quasirandom structure approaches, to account for different possible metal atom distributions on the cation sublattice. Density functional theory within the generalized gradient approximation was employed to calculate the electronic structure as well as predict the evolution of the lattice parameter and key mechanical properties, including single-crystal elastic constants and polycrystalline elastic moduli, of ternary Zr1-xTaxN compounds with cubic rocksalt structure. These calculated values are compared with experimental data from thin-film measurements using Brillouin light scattering and nanoindentation tests. We also study the validity of Vegard's empirical rule and the effect of growth-dependent stresses on the lattice parameter. The thermal stability of these Zr1-xTaxN films is also studied, based on their structural and mechanical response upon vacuum annealing at 850 degrees C for 3 h. Our findings demonstrate that Zr1-xTaxN alloys with Ta fraction 0.51 <= x <= 0.78 exhibit enhanced toughness, while retaining high hardness similar to 30 GPa, as a result of increased valence electron concentration and phase stability tuning. Calculations performed for disordered or ordered structures both lead to the same conclusion regarding the mechanical behavior of these nitride alloys, in agreement with recent literature findings [H. Kindlund, D. G. Sangiovanni, L. Martinez-de-Olcoz, J. Lu, J. Jensen, J. Birch, I. Petrov, J. E. Greene, V. Chirita, and L. Hultman, APL Materials 1, 042104 (2013)].
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页数:18
相关论文
共 86 条
[1]   Stress and preferred orientation in nitride-based PVD coatings [J].
Abadias, G. .
SURFACE & COATINGS TECHNOLOGY, 2008, 202 (11) :2223-2235
[2]   Stress, phase stability and oxidation resistance of ternary Ti-Me-N (Me = Zr, Ta) hard coatings [J].
Abadias, G. ;
Koutsokeras, L. E. ;
Siozios, A. ;
Patsalas, P. .
THIN SOLID FILMS, 2013, 538 :56-70
[3]   Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films [J].
Abadias, G. ;
Leroy, W. P. ;
Mahieu, S. ;
Depla, D. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2013, 46 (05)
[4]   Structure, phase stability and elastic properties in the Ti1-xZrxN thin-film system: Experimental and computational studies [J].
Abadias, G. ;
Ivashchenko, V. I. ;
Belliard, L. ;
Djemia, Ph .
ACTA MATERIALIA, 2012, 60 (15) :5601-5614
[5]   Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti-Zr-N and Ti-Ta-N [J].
Abadias, G. ;
Koutsokeras, L. E. ;
Dub, S. N. ;
Tolmachova, G. N. ;
Debelle, A. ;
Sauvage, T. ;
Villechaise, P. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (04) :541-551
[6]   Stress evolution in magnetron sputtered Ti-Zr-N and Ti-Ta-N films studied by in situ wafer curvature: Role of energetic particles [J].
Abadias, G. ;
Koutsokeras, L. E. ;
Guerin, Ph. ;
Patsalas, P. .
THIN SOLID FILMS, 2009, 518 (05) :1532-1537
[7]   In situ stress evolution during magnetron sputtering of transition metal nitride thin films [J].
Abadias, G. ;
Guerin, Ph. .
APPLIED PHYSICS LETTERS, 2008, 93 (11)
[8]   A structure zone diagram including plasma-based deposition and ion etching [J].
Anders, Andre .
THIN SOLID FILMS, 2010, 518 (15) :4087-4090
[9]  
[Anonymous], 1988, International series of monographs on physics
[10]   Structural and mechanical properties of TaZrN films: Experimental and ab initio studies [J].
Aouadi, SM .
JOURNAL OF APPLIED PHYSICS, 2006, 99 (05)